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Micro and Nano Fabrication

Tools and Processes

For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.

... we are and how we got there. They have chosen topics that will inspire and
inform you, the reader, about the plentiful challenges and opportunities in this
field. v Having begun research and teaching in integrated circuits in the Foreward
.