Micro and Nano Fabrication

Tools and Processes

For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.

• ISBN 13 : 3662443953
• ISBN 10 : 9783662443958
• Judul : Micro and Nano Fabrication
• Sub Judul : Tools and Processes
• Pengarang : Hans H. Gatzen,   Volker Saile,   Jürg Leuthold,  
• Kategori : Technology & Engineering
• Penerbit : Springer
• Bahasa : en
• Tahun : 2015
• Halaman : 519
• Halaman : 519
• Google Book : https://play.google.com/store/books/details?id=qzwLBgAAQBAJ&source=gbs_api
• Ketersediaan :

... we are and how we got there. They have chosen topics that will inspire and
inform you, the reader, about the plentiful challenges and opportunities in this
field. v Having begun research and teaching in integrated circuits in the Foreward
.